本校於2012年12月18日獲得美國發明第US 8,334,981 B2號專利，專利名稱為 「Orthogonal-polarization mirau interferometry and beam-splitting module and interferometric system using the same (正交偏極式Mirau干涉術以及其分光模組與干涉系統)」

內容：

1. 專利國別：美國
2. 公告日：2012年12月18日
3. 專利類型：發明
4. 專利號：US 8,334,981 B2
5. 專利名稱：Orthogonal-polarization mirau interferometry and beam-splitting module and interferometric system using the same (正交偏極式Mirau干涉術以及其分光模組與干涉系統)
6. 摘要：An orthogonal-polarization Mirau interferometric system is provided, wherein a narrow-band or broad-band incident light is split into a reference light and an inspection light with the polarizations thereof being orthogonal to each other by using a beam-splitting module, while projecting the inspection light on a measured object to form an object light, and then the object light and the reference light are combined to form a combined light, and thereafter, an analyzer is utilized to modulate the polarizations and the intensities of the two lights for making the two lights interfere with each other and thus create an interference pattern. The polarization of the object light and that of the reference light can be adjusted by using an analyzer to become orthogonal to each other, and the intensities of the object light and the reference light can be adjusted to about the same for producing an interference pattern with high contrast.